JPS644435U - - Google Patents
Info
- Publication number
- JPS644435U JPS644435U JP1987100562U JP10056287U JPS644435U JP S644435 U JPS644435 U JP S644435U JP 1987100562 U JP1987100562 U JP 1987100562U JP 10056287 U JP10056287 U JP 10056287U JP S644435 U JPS644435 U JP S644435U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- reticle
- line
- featuring
- patterns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987100562U JPS644435U (en]) | 1987-06-29 | 1987-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987100562U JPS644435U (en]) | 1987-06-29 | 1987-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS644435U true JPS644435U (en]) | 1989-01-11 |
Family
ID=31328748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987100562U Pending JPS644435U (en]) | 1987-06-29 | 1987-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS644435U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100389567B1 (ko) * | 1999-08-19 | 2003-06-27 | 엔이씨 일렉트로닉스 코포레이션 | 전자선노광마스크, 전자선노광방법, 반도체장치 제조방법및 전자선노광장치 |
| DE112022005323T5 (de) | 2021-11-05 | 2024-08-29 | Wacom Co., Ltd. | Verfahren, computer und programm zum ausstellen eines nft |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55132039A (en) * | 1979-04-02 | 1980-10-14 | Mitsubishi Electric Corp | Forming method for repeated figure |
| JPS5843513A (ja) * | 1981-09-08 | 1983-03-14 | Nec Corp | フオトマスクパタ−ン投影露光方法 |
-
1987
- 1987-06-29 JP JP1987100562U patent/JPS644435U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55132039A (en) * | 1979-04-02 | 1980-10-14 | Mitsubishi Electric Corp | Forming method for repeated figure |
| JPS5843513A (ja) * | 1981-09-08 | 1983-03-14 | Nec Corp | フオトマスクパタ−ン投影露光方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100389567B1 (ko) * | 1999-08-19 | 2003-06-27 | 엔이씨 일렉트로닉스 코포레이션 | 전자선노광마스크, 전자선노광방법, 반도체장치 제조방법및 전자선노광장치 |
| DE112022005323T5 (de) | 2021-11-05 | 2024-08-29 | Wacom Co., Ltd. | Verfahren, computer und programm zum ausstellen eines nft |